TY - CONF T1 - Nature of hot carrier damage in Spacer oxide of LDD n-MOSFETs JO - 2002 23RD INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS PY - 2002/01/01 AU - Manhas SK AU - Sekhar DC AU - Oates AS AU - De Souza MM AU - IEEE AU - IEEE ED - SP - 735 EP - 739 Y2 - 2025/05/16 ER -