@article{article, title = {{An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas}}, publisher = {{Springer Science and Business Media LLC}}, url = {{http://dx.doi.org/10.1007/bf00372203 }}, year = {{1996}}, month = {{4}}, author = {{Alexander MR and Short RD and Jones FR and Stollenwerk M and Zabold J and Michaeli W}}, doi = {{10.1007/bf00372203}}, volume = {{31}}, journal = {{Journal of Materials Science}}, issue = {{7}}, pages = {{1879-1885}}, note = {{Accessed on 2025/05/19}}}