@article{article, title = {{In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination}}, publisher = {{Elsevier BV}}, url = {{http://dx.doi.org/10.1016/j.optlaseng.2024.108692 }}, year = {{2025}}, month = {{1}}, author = {{Atkinson JBP and Howse JR}}, doi = {{10.1016/j.optlaseng.2024.108692}}, volume = {{184}}, journal = {{Optics and Lasers in Engineering}}, pages = {{108692-108692}}, note = {{Accessed on 2025/05/17}}}