@article{article, title = {{Fabrication and Operation of a Microcavity Plasma Array Device for Microscale Surface Modification}}, publisher = {{Wiley}}, url = {{http://dx.doi.org/10.1002/ppap.201100166 }}, year = {{2012}}, month = {{3}}, author = {{Al-Bataineh SA and Szili EJ and Gruner PJ and Priest C and Griesser HJ and Voelcker NH and Short RD and Steele DA}}, doi = {{10.1002/ppap.201100166}}, volume = {{9}}, journal = {{Plasma Processes and Polymers}}, issue = {{7}}, pages = {{638-646}}, note = {{Accessed on 2025/07/20}}}