@inproceedings{inproceedings, title = {{Silicon photonics mid-infrared devices and sensors}}, publisher = {{SPIE}}, url = {{http://dx.doi.org/10.1117/12.2692320 }}, year = {{2024}}, month = {{3}}, author = {{Mashanovich GZ and Wei C and McQuillan S and Ismaeel R and Lack N and Hu T and Zhou L and Groom KM and Heffernan J and Patey MD and Cardwell CL et al}}, doi = {{10.1117/12.2692320}}, journal = {{Smart Photonic and Optoelectronic Integrated Circuits 2024}}, note = {{Accessed on 2025/05/24}}}