@article{article, title = {{A study of HMDSO/O2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument: curve fitting of the Si 2p core level}},
publisher = {{Elsevier BV}},
url = {{http://dx.doi.org/10.1016/s0169-4332(98)00479-6 }},
year = {{1999}},
month = {{1}},
author = {{Alexander MR and Short RD and Jones FR and Michaeli W and Blomfield CJ}},
doi = {{10.1016/s0169-4332(98)00479-6}},
volume = {{137}},
journal = {{Applied Surface Science}},
issue = {{1-4}},
pages = {{179-183}},
note = {{Accessed on 2025/07/10}}}