@article{article, title = {{Capacitively and inductively coupled plasmas for mems applications}}, url = {{}}, year = {{2004}}, month = {{1}}, author = {{Lozano-Parada JH and Zimmerman WBJ}}, volume = {{3}}, journal = {{Proceedings of the 7th Biennial Conference on Engineering Systems Design and Analysis, ESDA 2004}}, pages = {{545-551}}, note = {{Accessed on 2025/07/17}}}