@article{article, title = {{Solid-phase epitaxial regrowth of amorphous silicon containing helium bubbles}}, publisher = {{AIP Publishing}}, url = {{}}, year = {{2008}}, month = {{1}}, author = {{Beaufort MF and Pizzagalli L and Gandy AS and Oliviero E and Eyidi D and Donnelly SE}}, doi = {{10.1063/1.3009383}}, volume = {{104}}, journal = {{Journal of Applied Physics}}, issue = {{9}}, pages = {{094905-094905}}, note = {{Accessed on 2025/05/19}}}