TY - CONF T1 - High resolution ELNES characterization of chemical bonding in low-dielectric constant materials for interconncet isolation PY - 2005/01/01 AU - Stegmann H AU - Walther T AU - Quandt E AU - Zschech E AU - Schmeisser D ED - SP - 238 EP - 238 Y2 - 2025/05/21 ER -